Microfabricated systems and MEMS VII : proceedings of the international symposium

Author(s)

• Microfabricated Systems and MEMS
• Electrochemical Society. Meeting
• Davidson, J. L.
• Electrochemical Society. Electronics Division
• Electrochemical Society. Sensor Division
• Electrochemical Society. Dielectric Science and Technology Division

Bibliographic Information

Microfabricated systems and MEMS VII : proceedings of the international symposium

editors, J. L. Davidson ... [et al.] ; sponsoring divisions, Electronics, Sensor, Dielectric Science and Technology

（Proceedings / [Electrochemical Society], v. 2004-09）

Electrochemical Society, c2004

Note

"... held at the 206th Meeting of the Electrochemical society, October 3-8, 2004, in Honolulu, Hawaii"--on pref

Includes bibliographical references and indexes

Details

• NCID: BA73994043
• ISBN:
  • 1566774225
• LCCN: 2004109902
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, N.J.
• Pages/Volumes: viii, 339 p.
• Size: 24 cm
• Parent Bibliography ID:
  • BA01323290