Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium

著者

• Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
• Electrochemical Society. Meeting
• Sah, Ram Ekwal
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics Division

書誌事項

Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium

editors, R.E. Sah ... [et al.] ; sponsoring divisions, Dielecric Scoeice and Technology, Electronics

（Proceedings / [Electrochemical Society], v. 2005-01）

Electrochemical Society, c2005

注記

"... held May 16-20, 2005 in Québec City as a part of the 207th Meeting of the Electrochemical Society (ECS)"--on pref

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA7416305X
• ISBN:
  • 1566774594
• LCCN: 2005922516
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, N.J.
• ページ数/冊数: xiii, 588 p.
• 大きさ: 24 cm
• 親書誌ID:
  • BA01323290