EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium

著者

• European Conference on Chemical Vapor Deposition
• Electrochemical Society. High Temperature Materials Division
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics Division
• Devi, Anjana

書誌事項

EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium

editors, Anjana Devi ... [et al.] ; sponsoring divisions, High Temperature Materials, Dielectric Science and Technology, and Electronics and Photonics

（Proceedings / [Electrochemical Society], v. 2005-09）

Electrochemical Society, c2005

注記

"... held from 5th to 9th September, 2005 in Bochum, Germany" --on pref.

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA74394482
• ISBN:
  • 1566774276
• LCCN: 2005929043
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: xviii, 1106 p.
• 大きさ: 24 cm
• 親書誌ID:
  • BA01323290