Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France

Author(s)

• Symposium on Crystalline Defects and Contamination: their Impact and Control in Device Manufacturing
• Kolbesen, Bernd O.
• European Solid State Device Research Conference

Bibliographic Information

Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France

editors, Bernd O. Kolbesen ... [et al.] ; sponsoring division, Electronics and Photonics

（Proceedings / [Electrochemical Society], v. 2005-10）

Electrochemical Society, c2005

Note

Includes bibliographic references and indexes

Details

• NCID: BA74394959
• ISBN:
  • 1566774284
• LCCN: 2005929601
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, N.J.
• Pages/Volumes: viii, 190 p.
• Size: 24 cm
• Parent Bibliography ID:
  • BA01323290