Proceedings 6th international workshop on expert evaluation & control of compound semiconductor materials & technologies, Budapest, Hungary 26-29 May 2002
著者
書誌事項
Proceedings 6th international workshop on expert evaluation & control of compound semiconductor materials & technologies, Budapest, Hungary 26-29 May 2002
（Physica status solidi, Conferences ; 0,
Wiley-VCH, c2003
- タイトル別名
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EXMATEC'02
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
The scientific scope of EXMATEC encompasses a broad range of compound semiconductor device-related issues as well as materials related problems, in both cases emphasizing fabrication, processing and characterization.The conference presentaions were grouped into eight sections: Growth: Process monitoring, improving of individual stepsGallium nitride and related compounds: materials and devicesCharacterization, identification and reduction of defects in epitaxial layersHigh frequency and high power devices: material related issuesOptoelectronic materials and devices, reliability issuesQuantum dots, nanostructures, low dimensional systemsCharacterization techniquesNew frontiers: materials, technologies, structures, devices
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