Characterization and metrology for ULSI technology 2005, Richardson, Texas 15-18 March 2005

Author(s)

• International Conference on Characterization and Metrology for ULSI Technology (2005 : Richardson, Tex.)
• American Institute of Physics
• Seiler, David G.

Bibliographic Information

Characterization and metrology for ULSI technology 2005, Richardson, Texas 15-18 March 2005

editors, David G. Seiler ... [et al.] ; sponsoring organizations, National Institute of Standards and Technology ... [et al.].

（AIP conference proceedings, v. 788）

American Institute of Physics, c2005

Note

Includes bibliographical references and index

Details

• NCID: BA75161355
• ISBN:
  • 0735402779
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Melville, N. Y.
• Pages/Volumes: xx, 667 p.
• Size: 28 cm
• Attached Material: 1 CD-ROM
• Parent Bibliography ID:
  • BA00284604