MEMS : introduction and fundamentals

Author(s)

• Gad-el-Hak, Mohamed

Bibliographic Information

MEMS : introduction and fundamentals

edited by Mohamed Gad-el-Hak

（Mechanical engineering series / series editor, Frank Kreith, . The MEMS handbook）

CRC, Taylor & Francis, 2006

• : hardcover

Note

The MEMS handbook, 2nd ed

"A CRC Press book"--Back cover

Includes bibliographical references and index

Details

• NCID: BA75369742
• ISBN:
  • 0849391377
• LCCN: 2005050111
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Boca Raton, Fla.
• Pages/Volumes: 1 v. (various pagings)
• Size: 26 cm
• Classification:
  • LCC : TK7875
  • LCC : TK7874
  • DC22 : 621.381
• Subject Headings:
  • LCSH : Microelectromechanical systems
  • LCSH : Microelectronics
  • LCSH : Nanotechnology
• Parent Bibliography ID:
  • BA55567812