MEMS : introduction and fundamentals
著者
書誌事項
MEMS : introduction and fundamentals
（Mechanical engineering series / series editor, Frank Kreith, . The MEMS handbook）
CRC, Taylor & Francis, 2006
- : hardcover
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注記
The MEMS handbook, 2nd ed
"A CRC Press book"--Back cover
Includes bibliographical references and index
内容説明・目次
内容説明
As our knowledge of MEMS continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This best-selling handbook is now more convenient than ever, and its coverage is unparalleled.
The first of three volumes, MEMS: Introduction and Fundamentals covers the theoretical and conceptual underpinnings of the field, emphasizing the physical phenomena that dominate at the micro-scale. It also explores the mechanical properties of MEMS materials, modeling and simulation of MEMS, control theory, and bubble/drop transport in microchannels. Chapters were updated where necessary, and the book also includes two new chapters on microscale hydrodynamics and lattice Boltzmann simulations. This volume builds a strong foundation for further study and work in the MEMS field.
MEMS: Introduction and Fundamentals comprises contributions from the foremost experts in their respective specialties from around the world. Acclaimed author and expert Mohamed Gad-el-Hak has again raised the bar to set a new standard for excellence and authority in the fledgling fields of MEMS and nanotechnology.
目次
Introduction. Scaling of Micromechanical Devices. Mechanical Properties of MEMS. Materials. Flow Physics. Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-electrical domains. Molecular-Based Microfluidic Simulation Models. Hydrodynamics of Small-Scale Internal Gaseous Flows. Burnett Simulations of Flows in Microdevices. Lattice Boltzmann Simulations of Slip Flow in Microchannels. Liquid Flow in Microchannels. Lubrication in MEMS. Physics of Thin Liquid Films. Bubble/Drop Transport in Microchannels. Fundamentals of Control Theory. Model-Based Flow Control for Distributed Architectures. Soft Computing in Control.
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