2005 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : "advancing semiconductor manufacturing excellence" : ASMC 2005 proceedings, 11-12 April, 2005, Munich, Germany
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2005 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : "advancing semiconductor manufacturing excellence" : ASMC 2005 proceedings, 11-12 April, 2005, Munich, Germany
IEEE Service Center, c2005
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Includes bibliographical references and index
"IEEE catalog number: 05CH37654"--on cover