Micro process engineering : fundamentals, devices, fabrication, and applications

Author(s)

• Kockmann, Norbert

Bibliographic Information

Micro process engineering : fundamentals, devices, fabrication, and applications

volume editor Norbert Kockmann

（Advanced micro & nanosystems, Vol. 5）

WILEY-VCH, c2006

Note

Subject index: p.497-507

Details

• NCID: BA75935409
• ISBN:
  • 3527312463
• Country Code: gw
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Weinheim, Germany
• Pages/Volumes: xxii, 507 p.
• Size: 25 cm
• Classification:
  • SG : 660
• Subject Headings:
  • SWD : Chemische Verfahrenstechnik -- Mikrosystemtechnik
• Parent Bibliography ID:
  • BA70371204