MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California

著者

• Lawton, Russell A.
• Society of Photo-optical Instrumentation Engineers
• Solid State Technology (Organization)

書誌事項

MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California

Russell A. Lawton ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, cooperating organizations, SolidState Technology ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3880）

SPIE, c1999

• pbk.

注記

Includes bibliographical references and index

内容説明・目次

内容説明

A selection of scientific papers on the reliability of microelectromechanical systems (MEMS) for critical and space applications.

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BA76480734
• ISBN:
  • 0819434779
• LCCN: 00266575
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Washington
• ページ数/冊数: vi, 176 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7875
  • DC21 : 621.381
• 件名:
  • LCSH : Microelectromechanical systems -- Reliability -- Congresses
• 親書誌ID:
  • BA0022700X