Radio frequency power in plasmas : 16th Topical Conference on Radio Frequency Power in Plasmas, Park City, Utah 11-13 April 2005

Author(s)

• Wukitch, Stephen J.
• American Institute of Physics
• Topical Conference on Radio Frequency Power in Plasmas

Bibliographic Information

Radio frequency power in plasmas : 16th Topical Conference on Radio Frequency Power in Plasmas, Park City, Utah 11-13 April 2005

editors, Stephen J. Wukitch, Paul T. Bonoli

（AIP conference proceedings, v. 787）

American Institute of Physics, c2005

Details

• NCID: BA76781752
• ISBN:
  • 0735402760
• LCCN: 2005932081
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Melville, N.Y
• Pages/Volumes: xiii, 457 p.
• Size: 25 cm
• Parent Bibliography ID:
  • BA00284604