Principles of physical vapor deposition of thin films
著者
書誌事項
Principles of physical vapor deposition of thin films
Elsevier, 2006
大学図書館所蔵 全7件
注記
Includes bibliographical references and index
内容説明・目次
内容説明
The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology.Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered essential to become knowledgeable in thin film depostition techniques. Its ultimate goal as a reference is to provide the foundation upon which thin film science and technological innovation are possible.
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