Principles of physical vapor deposition of thin films
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Bibliographic Information
Principles of physical vapor deposition of thin films
Elsevier, 2006
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Includes bibliographical references and index
Description and Table of Contents
Description
The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology.Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered essential to become knowledgeable in thin film depostition techniques. Its ultimate goal as a reference is to provide the foundation upon which thin film science and technological innovation are possible.
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