Plasma electronics : applications in microelectronic device fabrication

Author(s)

• 真壁, 利明 マカベ, トシアキ
• Petrović, Z. (Zoran Lj)

Bibliographic Information

Plasma electronics : applications in microelectronic device fabrication

by T. Makabe and Z. Petrović

（Series in plasma physics）

Taylor & Francis, 2006

Note

Includes bibliographical references and index

• NCID: BA76918777
• ISBN:
  • 9780750309769
• LCCN: 2005056888
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Boca Raton, FL
• Pages/Volumes: 339 p.
• Size: 24 cm
• Classification:
  • LCC : TA2020
  • DC22 : 621.044
• Subject Headings:
  • LCSH : Plasma engineering
• Parent Bibliography ID:
  • BA76729741