Silicon micromachining

Author(s)

• Elwenspoek, M. (Miko)
• Jansen, H. V. (Henri V.)

Bibliographic Information

Silicon micromachining

M. Elwenspoek and H.V. Jansen

（Cambridge studies in semiconductor physics and microelectronic engineering, 7）

Cambridge University Press, 2004

• : pbk

Note

"First paperback edition 2004"--T.p. verso

Includes bibliographical references and index

Details

• NCID: BA77002920
• ISBN:
  • 0521607671
• Country Code: uk
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Cambridge ; New York, N.Y.
• Pages/Volumes: xiii, 405 p.
• Size: 25 cm
• Classification:
  • LCC : TK7871.15.S55
  • DC21 : 621.3815
• Subject Headings:
  • LCSH : Silicon
  • LCSH : Micromachining
  • LCSH : Etching
• Parent Bibliography ID:
  • BA20948693