Advances in metrology for x-ray and EUV optics : 2-3 August 2005, San Diego, California, USA

著者

• Assoufid, Lahsen
• Takacs, Peter Z.
• Taylor, J. S. (John S.)
• Society of Photo-optical Instrumentation Engineers

書誌事項

Advances in metrology for x-ray and EUV optics : 2-3 August 2005, San Diego, California, USA

Lahsen Assoufid, Peter Z. Takacs, John S. Taylor, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 5921）

SPIE, c2005

注記

Includes bibliographical references and author index

詳細情報

• NII書誌ID(NCID): BA77243508
• ISBN:
  • 0819459267
• LCCN: 2005284398
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: 1 v. (various pagings)
• 大きさ: 28 cm
• 分類:
  • LCC : QC367
  • DC22 : 681/.25
• 件名:
  • LCSH : Optical measurements -- Congresses
  • LCSH : Optical instruments -- Design and construction -- Congresses
  • LCSH : Measuring instruments -- Design and construction -- Congresses
  • LCSH : Laser interferometers -- Congresses
  • LCSH : Mensuration -- Congresses
• 親書誌ID:
  • BA0022700X