Electrochemical processes in ULSI and MEMS : proceedings of the international symposium

Author(s)

• Deligianni, H.
• Electrochemical Society. Electrodeposition Division

Bibliographic Information

Electrochemical processes in ULSI and MEMS : proceedings of the international symposium

editors, H. Deligianni ...[et al.] ; sponsoring divisions, Electrodeposition

（Proceedings / [Electrochemical Society], v. 2004-17）

Electrochemical Society, c2005

Note

Includes bibliographical references and indexes

Details

• NCID: BA77251823
• ISBN:
  • 1566774721
• LCCN: 2005927817
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, N.J.
• Pages/Volumes: ix, 480 p.
• Size: 24 cm
• Parent Bibliography ID:
  • BA01323290