Electrochemical processes in ULSI and MEMS : proceedings of the international symposium

Author(s)

Bibliographic Information

Electrochemical processes in ULSI and MEMS : proceedings of the international symposium

editors, H. Deligianni ...[et al.] ; sponsoring divisions, Electrodeposition

（Proceedings / [Electrochemical Society], v. 2004-17）

Electrochemical Society, c2005

Available at  / 1 libraries

Search this Book/Journal

Note

Includes bibliographical references and indexes

Related Books： 1-1 of 1

  • Proceedings

    [Electrochemical Society]

    Electrochemical Society

Details

  • NCID
    BA77251823
  • ISBN
    • 1566774721
  • LCCN
    2005927817
  • Country Code
    us
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    Pennington, N.J.
  • Pages/Volumes
    ix, 480 p.
  • Size
    24 cm
  • Parent Bibliography ID
Page Top