Microprocesses and nanotechnology 2003 : 2003 International Microprocesses and Nanotechnology Conference : October 29-31, 2003, Tokyo, Japan : digest of papers

書誌事項

Microprocesses and nanotechnology 2003 : 2003 International Microprocesses and Nanotechnology Conference : October 29-31, 2003, Tokyo, Japan : digest of papers

sponsored by the Japan Society of Applied Physics ; technical-cosponsored [by] IEEE Electron Device Society ; cooperation, American Vacuum Society ... [et al.]

Business Center for Academic Societies Japan, c2003

  • pbk.

タイトル別名

Microprocesses and nanotechnology 2003

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注記

"JSAP CAT. No. JSAP031240 ; IEEE Catalog No. 03EX738"--T.p. verso

Includes bibliographical references and author index

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