Microprocesses and nanotechnology 2003 : 2003 International Microprocesses and Nanotechnology Conference : October 29-31, 2003, Tokyo, Japan : digest of papers

Author(s)

• International Microprocesses and Nanotechnology Conference
• IEEE Electron Devices Society
• 応用物理学会 オウヨウ ブツリ ガッカイ
• American Vacuum Society

Bibliographic Information

Microprocesses and nanotechnology 2003 : 2003 International Microprocesses and Nanotechnology Conference : October 29-31, 2003, Tokyo, Japan : digest of papers

sponsored by the Japan Society of Applied Physics ; technical-cosponsored [by] IEEE Electron Device Society ; cooperation, American Vacuum Society ... [et al.]

Business Center for Academic Societies Japan, c2003

• pbk.

Other Title

Microprocesses and nanotechnology 2003

Note

"JSAP CAT. No. JSAP031240 ; IEEE Catalog No. 03EX738"--T.p. verso

Includes bibliographical references and author index

Details

• NCID: BA77494803
• ISBN:
  • 4891140402
• LCCN: 2004299804
• Country Code: ja
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Tokyo, Japan
• Pages/Volumes: xxv, 349 p.
• Size: 28 cm
• Classification:
  • LCC : TK7874
  • DC22 : 621.3815/31
• Subject Headings:
  • LCSH : Microlithography -- Congresses
  • LCSH : Nanotechnology -- Congresses
  • LCSH : Microelectronics -- Congresses
  • LCSH : Microfabrication -- Congresses