Description
This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
Table of Contents
Volume 1.- Design Methods in MEMS/NEMS.- Web-Enabled Database System Development for Design and Manufacturing of Micro-Electro-Mechanical Systems (MEMS).- Manufacturing Advisory Service Systems for Concurrent and Collaborative Design of MEMS Devices.- Web-Enabled Knowledge - Intensive Support Framework for Collaborative Design of MEMS.- Techniques in Proper Orthogonal Decomposition and Component Mode Synthesis for the Dynamic Simulation of Complex MEMS Devices and their Application.- Techniques in Global Optimal Design for MEMS and their Applications.- Theory and Design of Micromechanical Vibratory Gyroscopes.- A Hierarchical Design Platform for Microelectrofluidic Systems.- Techniques in Electrostatics Analysis of MEMS and their Applications.- Techniques for Efficient Analytical and Simulation Methods in the Prototyping of MEMS Systems Volume 2.- Fabrication Techniques for MEMS/NEMS.- Techniques in the Fabrication of High-Speed Micro-Rotors for MEMS Applications.- Fabrication Techniques in Micromachined Capacitive Ultrasonic Transducers and their Applications.- GaAs Thermally Based MEMS Devices - Fabrication Techniques, Characterization and Modeling.- Novel MEMS Fluidic Integrated Circuit Technology with 'MOSFET-Like Microvalve Elements'.- Hydrogel-based TAS in Microfluidic Devices and their Applications.- Crosslinked PMMA as a Low-Dimensional Dielectric Sacrificial Layer for MEMS/NEMS and Quantum Nanostructures Fabrication.- Techniques and Applications of Capactive Micromachined Ultrasonic Transducers Volume 3.- Manufacturing Methods in MEMS/NEMS.- Techniques in the Development of Micromachine Tool Prototypes and their Applications in Microfactories.- Tool-based Micro Machining and Applications in MEMS.- Micro-machined Passive Valves: Fabrication Techniques, Characterisation and their Application.- Rapid Prototyping and Rapid Tooling Techniques for the Manufacturing of Silicon, Polymer, Metal and CeramicMicrodevices.- Injection Molding Techniques for the Fabrication of MEMS Elements.- Excimer Laser Machined Three-Dimensional Microstructures-Techniques and Application.- Techniques in Scanning Acoustic Microscopy for Enhanced Failure and Material Analysis of Microsystems.- Production Scheduling in MEMS Manufacturing Volume 4.- Sensors and Actuators in MEMS/NEMS.- MEMS-based Accelerometers and their Application to Vibration Suppression in Hard Disk Drives.- Micromachined Thermal Accelerometer without Proof Mass.- Techniques in MEMS Devices for Micro Humidity Sensors and their Applications.- Modeling the Electromechanical Response of Electrostatic Actuators.- Micropump Systems Techniques and Applications in MEMS.- FEM (Finite Element Modeling) Techniques for Electrostatic Microactuators.- Techniques in the Design of Thermomechanical Microactuators.- Techniques in MEMS Microthermal Actuators and their Applications.- Techniques in Residual Stress Measurement for MEMS and their Applications Volume 5.- Medical Applications of MEMS/NEMS and MOEMS (Micro Optical Electro Mechanical Systems).- Techniques in Sonophoresis Biomedical Devices and their Applications.- MEMS Application of Actuators and Sensors for Glaucoma Treatment.- Single-crystal Silicon Based Electrothermal MEMS Mirrors for Biomedical Imaging Applications.- Techniques in the Development of Endovascular Microtools and their Applications.- Techniques in the Design and Fabrication of Optical MEMS Switches and their Application in Optical Communication Systems.- Micromachining Techniques and MEMS Structures in Optical Interferometric Sensors.- Magnetic Microactuators - Techniques and Applications.- Techniques in the Design of Micro-Machined Electrostatic Torsion Micro-Mirrors and their Applications.- Vertical Combdrive Actuator: Design and Fabrication for Micromirror Applications .- Three-Dimensional Techniques for FEM Simulations in Laser Modules and their
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