2005 International Conference on Simulation of Semiconductor Processes and Devices : SISPAD 2005 : September 1-3, 2005, Komaba Eminence, Tokyo, Japan
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2005 International Conference on Simulation of Semiconductor Processes and Devices : SISPAD 2005 : September 1-3, 2005, Komaba Eminence, Tokyo, Japan
Japan Society of Applied Phyisics , IEEE, c2005
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05TH8826
AP051227
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"IEEE Catalog Number 05TH8826"--T.p. verso
"JSAP Catalog Number AP051227"--T.p. verso
Includes bibliographical references and author index