Process technology for silicon carbide devices

Author(s)

• Zetterling, Carl-Mikael
• Institution of Electrical Engineers

Bibliographic Information

Process technology for silicon carbide devices

edited by Carl-Mikael Zetterling

（EMIS processing series / Series advisor B.L. Weiss, 2）

INSPEC, c2002

Note

Includes bibliographical references and index

Details

• NCID: BA78505392
• ISBN:
  • 0852969988
• Country Code: uk
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: London
• Pages/Volumes: xxii, 176 p
• Size: 26 cm
• Classification:
  • DC21 : 621.38152
• Subject Headings:
  • LCSH : Silicon carbide -- Electric properties
• Parent Bibliography ID:
  • BA59159716