Ion beam techniques for the analysis of light elements in thin films, including depth profiling : final report of a co-ordinated research project 2000-2003
著者
書誌事項
Ion beam techniques for the analysis of light elements in thin films, including depth profiling : final report of a co-ordinated research project 2000-2003
（IAEA-TECDOC, 1409）
International Atomic Energy Agency, 2004
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注記
Includes bibliographic references
IAEA-TECDOC-1409
内容説明・目次
内容説明
This publication highlights the achievements of a Coordinated Research Project (CRP) in promoting the potential of accelerator-based nuclear techniques of analysis for light elements in thin films. The objectives of this CRP were to develop a coordinated research effort between accelerator laboratories and materials science research groups in order to assist and promote the development of quality assurance methods, to evaluate databases of the parameters needed for quantitative analysis, and to develop and apply techniques to selected problems concerning the surface modification of materials and the production of thin films. Through various case studies, this publication assesses and demonstrates the effectiveness of accelerator-based nuclear techniques for analysis to provide valuable data and knowledge not readily accessible using other methods.
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