{"@context":{"owl":"http://www.w3.org/2002/07/owl#","bibo":"http://purl.org/ontology/bibo/","foaf":"http://xmlns.com/foaf/0.1/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/"},"@id":"https://ci.nii.ac.jp/ncid/BA78758263.json","@graph":[{"@id":"https://ci.nii.ac.jp/ncid/BA78758263#entity","@type":"bibo:Book","foaf:isPrimaryTopicOf":{"@id":"https://ci.nii.ac.jp/ncid/BA78758263.json"},"dc:title":[{"@value":"半導体製造装置用語辞典"},{"@value":"ハンドウタイ セイゾウ ソウチ ヨウゴ ジテン","@language":"ja-hrkt"}],"dcterms:alternative":["Terminological dictionary of semiconductor equipment"],"dc:creator":"日本半導体製造装置協会編","dc:publisher":[{"@value":"日刊工業新聞社"}],"dcterms:extent":"x, 564p","cinii:size":"21cm","dc:language":"jpn","dc:date":"2006","cinii:ncid":"BA78758263","prism:edition":"第6版","cinii:ownerCount":"46","foaf:maker":[{"@id":"https://ci.nii.ac.jp/author/DA02628777#entity","@type":"foaf:Person","foaf:name":[{"@value":"日本半導体製造装置協会"},{"@value":"ニホン ハンドウタイ セイゾウ ソウチ キョウカイ","@language":"ja-hrkt"}]}],"bibo:owner":[{"@id":"https://ci.nii.ac.jp/library/FA001415","@type":"foaf:Organization","foaf:name":"東北大学 附属図書館 工学分館","rdfs:seeAlso":{"@id":"https://opac.library.tohoku.ac.jp/opac/opac_openurl/?ncid=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA001641","@type":"foaf:Organization","foaf:name":"筑波大学 附属図書館 図書館情報学図書館","rdfs:seeAlso":{"@id":"https://www.tulips.tsukuba.ac.jp/mylimedio/search/search.do?target=local&mode=comp&ncid=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA001743","@type":"foaf:Organization","foaf:name":"埼玉大学 図書館","rdfs:seeAlso":{"@id":"https://opac.lib.saitama-u.ac.jp/Main/OpenSearch?ncid=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA022153","@type":"foaf:Organization","foaf:name":"東京大学 柏図書館","rdfs:seeAlso":{"@id":"https://opac.dl.itc.u-tokyo.ac.jp/opac/opac_openurl/?ncid=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA002203","@type":"foaf:Organization","foaf:name":"金沢大学 附属図書館 医学図書館","rdfs:seeAlso":{"@id":"http://www1.lib.kanazawa-u.ac.jp/recordID/catalog.bib/BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA002258","@type":"foaf:Organization","foaf:name":"山梨大学 附属図書館","rdfs:seeAlso":{"@id":"https://opac.lib.yamanashi.ac.jp/opac/opac_openurl?ncid=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA002542","@type":"foaf:Organization","foaf:name":"名古屋工業大学 図書館","rdfs:seeAlso":{"@id":"https://opac.lib.nitech.ac.jp/opc/recordID/catalog.bib/BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA002870","@type":"foaf:Organization","foaf:name":"大阪大学 附属図書館 理工学図書館","rdfs:seeAlso":{"@id":"https://opac.library.osaka-u.ac.jp/opac/opac_openurl/?ncid=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA003104","@type":"foaf:Organization","foaf:name":"和歌山大学 教育機構学術情報センター 図書館","rdfs:seeAlso":{"@id":"https://opac.center.wakayama-u.ac.jp/opac/opac_openurl/?ncid=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA003308","@type":"foaf:Organization","foaf:name":"山口大学 図書館 工学部図書館","rdfs:seeAlso":{"@id":"https://opac.lib.yamaguchi-u.ac.jp/opac/opac_openurl/?ncid=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA003319","@type":"foaf:Organization","foaf:name":"徳島大学 附属図書館","rdfs:seeAlso":{"@id":"https://opac.lib.tokushima-u.ac.jp/opac/search?target=local&searchmode=complex&autoDetail=true&s_ncid=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA02289X","@type":"foaf:Organization","foaf:name":"九州大学 理系図書館","rdfs:seeAlso":{"@id":"https://catalog.lib.kyushu-u.ac.jp/opac_openurl/?ncid=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA004490","@type":"foaf:Organization","foaf:name":"東北工業大学 附属図書館","rdfs:seeAlso":{"@id":"https://opac.tohtech.ac.jp/opac/search?target=local&searchmode=complex&autoDetail=true&s_ncid=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA004876","@type":"foaf:Organization","foaf:name":"千葉工業大学 附属図書館","rdfs:seeAlso":{"@id":"https://opac2.lib.chibatech.ac.jp/"}},{"@id":"https://ci.nii.ac.jp/library/FA005325","@type":"foaf:Organization","foaf:name":"芝浦工業大学 大宮図書館","rdfs:seeAlso":{"@id":"https://library.shibaura-it.ac.jp/cgi-bin/search.cgi?ncid=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA005358","@type":"foaf:Organization","foaf:name":"上智大学 図書館","rdfs:seeAlso":{"@id":"https://www.lib.sophia.ac.jp/opac/opac_openurl?ncid=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA005471","@type":"foaf:Organization","foaf:name":"成蹊大学 図書館","rdfs:seeAlso":{"@id":"https://opac.seikei.ac.jp/opac/search?target=local&searchmode=complex&autoDetail=true&s_ncid=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA005493","@type":"foaf:Organization","foaf:name":"成城大学 図書館","rdfs:seeAlso":{"@id":"https://opac.lib.seijo.ac.jp/opac/opac_openurl?ncid=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA005890","@type":"foaf:Organization","foaf:name":"東海大学 付属図書館 静岡図書館","rdfs:seeAlso":{"@id":"https://opac-t.time.u-tokai.ac.jp/iwjs0018opc/ufirdi.do?ufi_target=ctlsrh&ncid=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA006066","@type":"foaf:Organization","foaf:name":"東京電機大学 総合メディアセンター 千住センター"},{"@id":"https://ci.nii.ac.jp/library/FA006077","@type":"foaf:Organization","foaf:name":"東京電機大学 総合メディアセンター 鳩山センター"},{"@id":"https://ci.nii.ac.jp/library/FA006204","@type":"foaf:Organization","foaf:name":"東洋大学 附属図書館 川越図書館","rdfs:seeAlso":{"@id":"https://triton.lib.toyo.ac.jp/gate?module=search&path=search.do&method=search&searchForm.library=true&searchForm.orderNumber=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA006179","@type":"foaf:Organization","foaf:name":"東洋大学 附属図書館","rdfs:seeAlso":{"@id":"https://triton.lib.toyo.ac.jp/gate?module=search&path=search.do&method=search&searchForm.library=true&searchForm.orderNumber=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA006576","@type":"foaf:Organization","foaf:name":"法政大学 小金井図書館","rdfs:seeAlso":{"@id":"https://opac.lib.hosei.ac.jp/opac/opac_openurl?ncid=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA006678","@type":"foaf:Organization","foaf:name":"明治大学 図書館","rdfs:seeAlso":{"@id":"https://opac2018.lib.meiji.ac.jp/webopac/ufirdi.do?ufi_target=ctlsrh&ncid=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA006849","@type":"foaf:Organization","foaf:name":"神奈川大学 図書館","rdfs:seeAlso":{"@id":"http://opac.kanagawa-u.ac.jp/webopac/ufirdi.do?ufi_target=ctlsrh&ncid=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA007364","@type":"foaf:Organization","foaf:name":"豊田工業大学 総合情報センター"},{"@id":"https://ci.nii.ac.jp/library/FA007670","@type":"foaf:Organization","foaf:name":"同志社大学 図書館","rdfs:seeAlso":{"@id":"https://doors.doshisha.ac.jp/opac/opac_openurl/?ncid=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA007739","@type":"foaf:Organization","foaf:name":"立命館大学 図書館","rdfs:seeAlso":{"@id":"http://runners.ritsumei.ac.jp/opac/opac_openurl/?ncid=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA007841","@type":"foaf:Organization","foaf:name":"大阪工業大学 図書館","rdfs:seeAlso":{"@id":"https:/opac.lib.oit.ac.jp/iwjs0021opc/ctlsrh.do?ncid=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA007852","@type":"foaf:Organization","foaf:name":"大阪産業大学 綜合図書館","rdfs:seeAlso":{"@id":"https://library.cnt.osaka-sandai.ac.jp/gate?module=search&path=search&method=search&searchForm.library=true&searchForm.orderNumber=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA007965","@type":"foaf:Organization","foaf:name":"関西大学 図書館","rdfs:seeAlso":{"@id":"https://www.lib.kansai-u.ac.jp/webopac/ufirdi.do?ufi_target=ctlsrh&ncid=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA008050","@type":"foaf:Organization","foaf:name":"近畿大学 工学部図書館","rdfs:seeAlso":{"@id":"https://opac.clib.kindai.ac.jp/opac/opac_openurl/?ncid=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA015577","@type":"foaf:Organization","foaf:name":"近畿大学 生物理工学部図書館","rdfs:seeAlso":{"@id":"https://opac.clib.kindai.ac.jp/iwjs0014opc/ufirdi.do?ufi_target=ctlsrh&ncid=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA008221","@type":"foaf:Organization","foaf:name":"関西学院大学 図書館","rdfs:seeAlso":{"@id":"https://opac.kwansei.ac.jp/iwjs0001opc/cattab.do?sp_srh_flg=true&tab_num=0&locale=ja&ncid=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA008516","@type":"foaf:Organization","foaf:name":"岡山理科大学 図書館"},{"@id":"https://ci.nii.ac.jp/library/FA009042","@type":"foaf:Organization","foaf:name":"熊本学園大学 図書館","rdfs:seeAlso":{"@id":"https://lib-opac.kumagaku.ac.jp/mylimedio/search/search.do?target=local&mode=comp&ncid=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA013039","@type":"foaf:Organization","foaf:name":"静岡理工科大学 附属図書館","rdfs:seeAlso":{"@id":"https://sistlb.sist.ac.jp/mylimedio/search/search.do?target=local&mode=comp&category-mgz=1&category-book=1&annex=all&ncid=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA013946","@type":"foaf:Organization","foaf:name":"職業能力開発総合大学校 図書館"},{"@id":"https://ci.nii.ac.jp/library/FA014246","@type":"foaf:Organization","foaf:name":"富山県立大学 附属図書館 射水館","rdfs:seeAlso":{"@id":"https://lib.pu-toyama.ac.jp/opac/opac_openurl/?ncid=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA023611","@type":"foaf:Organization","foaf:name":"東京都立産業技術高等専門学校 品川キャンパス図書館","rdfs:seeAlso":{"@id":"https://www-uf01.ufinity.jp/lib_aiit_tmcit/"}},{"@id":"https://ci.nii.ac.jp/library/FA016310","@type":"foaf:Organization","foaf:name":"独立行政法人国立高等専門学校機構 香川高等専門学校 高松キャンパス 図書館"},{"@id":"https://ci.nii.ac.jp/library/FA020056","@type":"foaf:Organization","foaf:name":"秋田県立大学 附属図書館 本荘キャンパス図書館"},{"@id":"https://ci.nii.ac.jp/library/FA020169","@type":"foaf:Organization","foaf:name":"北九州学術研究都市学術情報センター","rdfs:seeAlso":{"@id":"http://lib.hibikino.ne.jp/webopac/ufirdi.do?ufi_target=ctlsrh&listcnt=20&maxcnt=1000&ncid=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA020191","@type":"foaf:Organization","foaf:name":"ものつくり大学 図書館・メディア情報センター","rdfs:seeAlso":{"@id":"https://opac-lib.iot.ac.jp/gate?module=search&path=search.do&method=search&searchForm.library=true&searchForm.orderNumber=BA78758263"}},{"@id":"https://ci.nii.ac.jp/library/FA023633","@type":"foaf:Organization","foaf:name":"東京都立産業技術大学院大学 附属図書館"}],"prism:publicationDate":["2006.9"],"cinii:note":["引用文献一覧表: p448"],"dc:subject":["NDC8:549.8","NDC9:549.8"],"foaf:topic":[{"@id":"https://ci.nii.ac.jp/books/search?q=%E5%8D%8A%E5%B0%8E%E4%BD%93+--+%E8%BE%9E%E5%85%B8","dc:title":"半導体 -- 辞典"}],"dcterms:hasPart":[{"@id":"urn:isbn:4526057401"}]}]}