Post-process techniques for integrated MEMS
著者
書誌事項
Post-process techniques for integrated MEMS
（MEMS--Microelectromechanical systems series）
Artech House, c2006
大学図書館所蔵 全1件
注記
Includes bibliographical references and index
Post-process techniques for integrated MEMS
（MEMS--Microelectromechanical systems series）
Artech House, c2006
Includes bibliographical references and index