Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A.

著者

• Materials Research Society. Spring Meeting
• Pawlak, B. J.

書誌事項

Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A.

editors, B.J. Pawlak ... [et al.]

（Materials Research Society symposium proceedings, v. 912）

Materials Research Society, c2006

注記

"This volume contains papers presented at Symposium C, "Sub-Second Rapid Thermal Processing for Device Fabrication," held April 18-19 at the 2006 MRS Spring Meeting in San Francisco, California."--Pref.

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA7964760X
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Warrendale, Pa.
• ページ数/冊数: xi, 213 p.
• 大きさ: 24 cm
• 親書誌ID:
  • BA00013775