Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A.

Bibliographic Information

Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A.

editors, B.J. Pawlak ... [et al.]

(Materials Research Society symposium proceedings, v. 912)

Materials Research Society, c2006

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Note

"This volume contains papers presented at Symposium C, "Sub-Second Rapid Thermal Processing for Device Fabrication," held April 18-19 at the 2006 MRS Spring Meeting in San Francisco, California."--Pref.

Includes bibliographical references and indexes

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Details
  • NCID
    BA7964760X
  • Country Code
    us
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    Warrendale, Pa.
  • Pages/Volumes
    xi, 213 p.
  • Size
    24 cm
  • Parent Bibliography ID
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