Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A.

Author(s)

• Materials Research Society. Spring Meeting
• Pawlak, B. J.

Bibliographic Information

Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A.

editors, B.J. Pawlak ... [et al.]

（Materials Research Society symposium proceedings, v. 912）

Materials Research Society, c2006

Note

"This volume contains papers presented at Symposium C, "Sub-Second Rapid Thermal Processing for Device Fabrication," held April 18-19 at the 2006 MRS Spring Meeting in San Francisco, California."--Pref.

Includes bibliographical references and indexes

Details

• NCID: BA7964760X
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Warrendale, Pa.
• Pages/Volumes: xi, 213 p.
• Size: 24 cm
• Parent Bibliography ID:
  • BA00013775