Microelectronic structures and MEMS for optical processing II : 14-15 October 1996, Austin, Texas

著者

    • Motamedi, M. Edward
    • Bailey, Wayne E.
    • Society of Photo-optical Instrumentation Engineers
    • Semiconductor Equipment and Materials International
    • National Institute of Standards and Technology (U.S.)

書誌事項

Microelectronic structures and MEMS for optical processing II : 14-15 October 1996, Austin, Texas

M. Edward Motamedi, Wayne Bailey, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 2881）

SPIE, 1996

  • pbk.

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注記

Includes bibliographical references

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  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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