Micromachined devices and components II : 14-15 October 1996, Austin, Texas

著者

• Chau, Kevin
• Roop, Ray M.
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International
• National Institute of Standards and Technology (U.S.)

書誌事項

Micromachined devices and components II : 14-15 October 1996, Austin, Texas

Kevin Chau, Ray M. Roop, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute for Standards and Technology

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 2882）

SPIE, 1996

• pbk.

タイトル別名

Micromachined devices and components 2

Micromachined devices and components two

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA79657206
• ISBN:
  • 0819422800
• LCCN: 96069476
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, WA
• ページ数/冊数: ix, 340 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TJ163
  • DC21 : 621.3815/2
• 件名:
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Micromachining -- Congresses
• 親書誌ID:
  • BA0022700X