Nanoscale calibration standards and methods : dimensional and related measurements in the micro- and nanometer range

著者

    • Wilkening, Günter
    • Koenders, Ludger

書誌事項

Nanoscale calibration standards and methods : dimensional and related measurements in the micro- and nanometer range

edited by Günter Wilkening, Ludger Koenders

Wiley-VCH, c2005

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注記

Conference proceedings

Includes bibliographical references and index

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