Nanoscale calibration standards and methods : dimensional and related measurements in the micro- and nanometer range

Author(s)

    • Wilkening, Günter
    • Koenders, Ludger

Bibliographic Information

Nanoscale calibration standards and methods : dimensional and related measurements in the micro- and nanometer range

edited by Günter Wilkening, Ludger Koenders

Wiley-VCH, c2005

Available at  / 2 libraries

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Conference proceedings

Includes bibliographical references and index

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