Nanoscale calibration standards and methods : dimensional and related measurements in the micro- and nanometer range

著者
    • Wilkening, Günter
    • Koenders, Ludger
書誌事項

Nanoscale calibration standards and methods : dimensional and related measurements in the micro- and nanometer range

edited by Günter Wilkening, Ludger Koenders

Wiley-VCH, c2005

この図書・雑誌をさがす
注記

Conference proceedings

Includes bibliographical references and index

詳細情報
ページトップへ