Fundamentals of semiconductor manufacturing and process control

Author(s)

• May, Gary S.
• Spanos, Costas J.

Bibliographic Information

Fundamentals of semiconductor manufacturing and process control

Gary S. May, Costas J. Spanos

IEEE , Wiley-Interscience, c2006

Note

Includes bibliographical references and index

Details

• NCID: BA80026836
• ISBN:
  • 9780471784067
• LCCN: 2005028448
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: [Piscataway],Hoboken, N.J.
• Pages/Volumes: xix, 463 p.
• Size: 25 cm
• Classification:
  • LCC : TK7871.85
  • DC22 : 621.3815/2
• Subject Headings:
  • LCSH : Semiconductors -- Design and construction
  • LCSH : Integrated circuits -- Design and construction
  • LCSH : Process control -- Statistical methods