Optical inspection of microsystems

Author(s)

• Osten, Wolfgang

Bibliographic Information

Optical inspection of microsystems

edited by Wolfgang Osten

（Optical science and engineering, 109）

CRC/Taylor & Francis, c2007

Note

Includes bibliographical references and index

Details

• NCID: BA8002849X
• ISBN:
  • 9780849336829
• LCCN: 2005046670
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Boca Raton, FL
• Pages/Volumes: 503 p., [8] p. of plates
• Size: 26 cm
• Classification:
  • LCC : TS156.2
  • DC22 : 670.42/5
• Subject Headings:
  • LCSH : Quality control -- Optical methods
  • LCSH : Optical detectors -- Industrial applications
  • LCSH : Microelectronics
• Parent Bibliography ID:
  • BA75065169