Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France

Author(s)

• Courtois, B. (Bernard)

Bibliographic Information

Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France

Bernard Courtois ... [et al.] chairs/editors ; sponsored by CNRS-INPG-UJF (France) ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4408）

SPIE, c2001

Note

Includes bibliographic references and author index

• NCID: BA80136947
• ISBN:
  • 0819441090
• LCCN: 2002265434
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Washington
• Pages/Volumes: xvi, 558 p.
• Size: 28 cm
• Classification:
  • LCC : TK7875
  • DC21 : 621.381
• Subject Headings:
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Optoelectronic devices -- Congresses
  • LCSH : Micromachining -- Congresses
  • LCSH : Microelectronic packaging -- Congresses
• Parent Bibliography ID:
  • BA0022700X