Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France

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Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France

Bernard Courtois ... [et. al.], chairs/editors ; sponsored by SPIE--The International Society for Optical Engineering, CNRS-INPG-UJF (France)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3680）

SPIE, c1999

  • pt. 1
  • pt. 2

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Includes bibliographical references and index

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  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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