Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France

Author(s)

• Courtois, B. (Bernard)
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France

Bernard Courtois ... [et. al.], chairs/editors ; sponsored by SPIE--The International Society for Optical Engineering, CNRS-INPG-UJF (France)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3680）

SPIE, c1999

• pt. 1
• pt. 2

Note

Includes bibliographical references and index

Details

• NCID: BA80138498
• ISBN:
  • 0819431540
  • 0819431540
• LCCN: 00689203
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: 2 v.
• Size: 28 cm
• Classification:
  • LCC : TK7875
  • DC21 : 621.381
• Subject Headings:
  • LCSH : Microelectromechanical systems Congresses
• Parent Bibliography ID:
  • BA0022700X