Fast simulation of electro-thermal MEMS : efficient dynamic compact models

Author(s)

    • Bechtold, T.
    • Rudnyi, E. B.
    • Korvink, J. G.

Bibliographic Information

Fast simulation of electro-thermal MEMS : efficient dynamic compact models

T. Bechtold, E.B. Rudnyi, J.G. Korvink

（Microtechnology and MEMS）

Springer, c2007

Available at  / 4 libraries

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Note

"With 108 figures, 8 in color and 9 tables"

Related Books： 1-1 of 1

Details

  • NCID
    BA80764688
  • ISBN
    • 9783540346128
  • Country Code
    gw
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    Berlin
  • Pages/Volumes
    xi, 180 p.
  • Size
    24 cm
  • Parent Bibliography ID
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