Fast simulation of electro-thermal MEMS : efficient dynamic compact models
著者
書誌事項
Fast simulation of electro-thermal MEMS : efficient dynamic compact models
（Microtechnology and MEMS）
Springer, c2007
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注記
"With 108 figures, 8 in color and 9 tables"
内容説明・目次
内容説明
This book provides the reader with a complete methodology and software environment for creating efficient dynamic compact models for electro-thermal MEMS devices. It supplies the basic knowledge and understanding for using model order reduction at the engineering level. This tutorial is written for MEMS engineers and is enriched with many case studies which equip readers with the know-how to facilitate the simulation of a specific problem.
目次
Dynamic Electro-thermal Simulation of Microsystems.- Overview of Linear Model Order Reduction.- Selected Model Reduction Software.- Application of Model Reduction to Electro-thermal MEMS.- Advanced Development.- References.
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