2005 proceedings : Ninth [i.e. 10th] International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference (CMP-MIC) : February 23-25, 2005, Marriott Hotel, Fremont, CA

著者

• International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference
• Microelectronics Institute Inter on-chip Connection
• IMIC

書誌事項

2005 proceedings : Ninth [i.e. 10th] International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference (CMP-MIC) : February 23-25, 2005, Marriott Hotel, Fremont, CA

a specialty conference of 2005 Microelectronics Institute Inter on-chip Connection

IMIC Headquarters?, 2005]

タイトル別名

International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference (CMP-MIC)

9th [i.e. 10th] International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference

注記

"Library of Congress No. 89-644090."

Includes bibliographical references

CMP-MIC Catalog No. 05 IMIC-1000P

• NII書誌ID(NCID): BA81219165
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: [Tampa, Fla
• ページ数/冊数: 594 p.
• 大きさ: 28 cm
• 件名:
  • LCSH : Integrated circuits -- Ultra large scale integration -- Design and construction -- Congresses
  • LCSH : Integrated circuits -- Very large scale integration -- Design and construction -- Congresses
  • LCSH : Grinding and polishing -- Congresses