2005 proceedings : Ninth [i.e. 10th] International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference (CMP-MIC) : February 23-25, 2005, Marriott Hotel, Fremont, CA

Author(s)

• International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference
• Microelectronics Institute Inter on-chip Connection
• IMIC

Bibliographic Information

2005 proceedings : Ninth [i.e. 10th] International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference (CMP-MIC) : February 23-25, 2005, Marriott Hotel, Fremont, CA

a specialty conference of 2005 Microelectronics Institute Inter on-chip Connection

IMIC Headquarters?, 2005]

Other Title

International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference (CMP-MIC)

9th [i.e. 10th] International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference

Note

"Library of Congress No. 89-644090."

Includes bibliographical references

CMP-MIC Catalog No. 05 IMIC-1000P

Details

• NCID: BA81219165
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: [Tampa, Fla
• Pages/Volumes: 594 p.
• Size: 28 cm
• Subject Headings:
  • LCSH : Integrated circuits -- Ultra large scale integration -- Design and construction -- Congresses
  • LCSH : Integrated circuits -- Very large scale integration -- Design and construction -- Congresses
  • LCSH : Grinding and polishing -- Congresses