2006 proceedings : Ereventh International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference (CMP-MIC) : February 21-23, 2006, Fremont Marriott Hotel, Fremont, CA

著者

• International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference
• Microelectronics Institute Inter on-chip Connection
• IMIC

書誌事項

2006 proceedings : Ereventh International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference (CMP-MIC) : February 21-23, 2006, Fremont Marriott Hotel, Fremont, CA

a specialty conference of 2006 Microelectronics Institute Inter on-chip Connection

IMIC Headquarters?, 2006]

タイトル別名

International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference (CMP-MIC)

11th International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference

注記

"Library of Congress No. 89-644090."

Includes bibliographical references

CMP-MIC Catalog No. 06 IMIC-1000P

詳細情報

• NII書誌ID(NCID): BA8122135X
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: [Tampa, Fla
• ページ数/冊数: 662 p.
• 大きさ: 28 cm
• 件名:
  • LCSH : Integrated circuits -- Ultra large scale integration -- Design and construction -- Congresses
  • LCSH : Integrated circuits -- Very large scale integration -- Design and construction -- Congresses
  • LCSH : Grinding and polishing -- Congresses