Cleaning Technology in Semiconductor Device Manufacturing IX

Author(s)

• International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
• Rużyłło, Jerzy
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics and PhotonicsDivision

Bibliographic Information

Cleaning Technology in Semiconductor Device Manufacturing IX

editors, J. Ruzyllo ... [et al.] ; sponsoring divisions, Electronics and Photonics, Dielectric Science and Technology

（ECS transactions, vol. 1, no. 3）

Electrochemical Society, c2005

Note

"... held during the Fall Meeting of the Electrochemical Society in Los Angeles, California in October 2005." -- on pref.

Includes bibliographical references and indexes

Details

• NCID: BA81681826
• ISBN:
  • 1566774292
• LCCN: 2005930731
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, NJ
• Pages/Volumes: xi, 379 p.
• Size: 24 cm
• Parent Bibliography ID:
  • BA78566502