Cleaning Technology in Semiconductor Device Manufacturing IX

著者

• International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
• Rużyłło, Jerzy
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics and PhotonicsDivision

書誌事項

Cleaning Technology in Semiconductor Device Manufacturing IX

editors, J. Ruzyllo ... [et al.] ; sponsoring divisions, Electronics and Photonics, Dielectric Science and Technology

（ECS transactions, vol. 1, no. 3）

Electrochemical Society, c2005

注記

"... held during the Fall Meeting of the Electrochemical Society in Los Angeles, California in October 2005." -- on pref.

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA81681826
• ISBN:
  • 1566774292
• LCCN: 2005930731
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: xi, 379 p.
• 大きさ: 24 cm
• 親書誌ID:
  • BA78566502