Enabling technologies for 3-D integration : symposium held November 27-29, 2006, Boston, Massachusetts, U.S.A.
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書誌事項
Enabling technologies for 3-D integration : symposium held November 27-29, 2006, Boston, Massachusetts, U.S.A.
(Materials Research Society symposium proceedings, v. 970)
Materials Research Society, c2007
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注記
"Them aim of this proceedings volume was to capture the majority of the content presented during Symposium Y, 'Enabling Technologies for 3-D Integration,' held November 27-29 at the 2006 MRS Fall Meeting in Boston Massachusetts."--Pref
Includes bibliographical references and indexes
