Enabling technologies for 3-D integration : symposium held November 27-29, 2006, Boston, Massachusetts, U.S.A.

著者
    • Bower, Christopher A.
    • Enabling Technologies for 3-D Integration
書誌事項

Enabling technologies for 3-D integration : symposium held November 27-29, 2006, Boston, Massachusetts, U.S.A.

editors: Christopher A. Bower ... [et al.]

(Materials Research Society symposium proceedings, v. 970)

Materials Research Society, c2007

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注記

"Them aim of this proceedings volume was to capture the majority of the content presented during Symposium Y, 'Enabling Technologies for 3-D Integration,' held November 27-29 at the 2006 MRS Fall Meeting in Boston Massachusetts."--Pref

Includes bibliographical references and indexes

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