Towards synthesis of micro-/nano-systems : the 11th International Conference on Precision Engineering (ICPE), August 16-18, 2006, Tokyo, Japan
著者
書誌事項
Towards synthesis of micro-/nano-systems : the 11th International Conference on Precision Engineering (ICPE), August 16-18, 2006, Tokyo, Japan
（JSPE publication series, no. 5）
Springer, c2007
- : hbk
- : ebk
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注記
"Organized by JSPE (Japan Society for Precision Engineering), co-organized by ASPE (American Society for Precision Engineering), euspen (European Society for Precision Engineering and Nanotechnology)."
Includes bibliographical references