Atomic layer deposition applications

著者

• Atomic Layer Deposition Applications
• Electrochemical Society. Meeting
• Electrochemical Society. Dielectric Science and Technology Division

書誌事項

Atomic layer deposition applications

editors, A. Londergan ... [et al.] ; sponsoring division, Dielectric Science & Technology

（ECS transactions, vol. 3, no. 15, vol. 11, no. 7, vol. 16, no. 4）

Electrochemical Society, c2007-

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注記

Includes bibliographical references and author index

"... held on October 29 through November 1, 2006 in the Moon Palace Resort, Cancun, Mexico as part of the 210th Meeting of the Electrochemical Society" -- 2

"... held on October 8 and 9, 2007 in the Hilton Washington, Washington, DC as part of the 212th Meeting of the Electrochemical Society."--3

"... held on October 13 through 15, 2008 in Honolulu, Hawaii, as part of the 214th Meeting of the Electrochemical Society" --4

• NII書誌ID(NCID): BA82713101
• ISBN:
  • 9781566775427
  • 9781566775731
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: v.
• 大きさ: 23 cm
• 親書誌ID:
  • BA78566502