Sputtering by particle bombardment : experiments and computer calculations from threshold to MeV energies
著者
書誌事項
Sputtering by particle bombardment : experiments and computer calculations from threshold to MeV energies
（Topics in applied physics, 110）
Springer, c2007
- : softcover
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注記
Includes bibliographical references and indexes
Softcover reprint of the hardcover 1st edition 2007
内容説明・目次
内容説明
This book provides a long-needed survey of new results. Especially welcome is a new summary of the measured and calculated sputtering yields with an algebraic approximation formula for the energy and angular dependence of the yields, which is useful for researchers who need sputtering yields for physics research or applied problems. The book offers a critical review of computational methods for calculating sputtering yields and also includes molecular dynamics calculations.
目次
Introduction and Overview (R. Behrisch, W. Eckstein).- Computer Simulation of the Sputtering Process (W. Eckstein, H.M. Urbassek).- Sputtering Yields (W. Eckstein).- Results of Molecular Dynamics Calculations (H.M. Urbassek).- Energy and Angular Distributions of Sputtered Species (H. Gnaser).- Chemical Sputtering (W. Jacob, J. Roth).- Electronic Sputtering with Swift Heavy Ions (W. Assmann, M. Toulemonde, C. Trautmann) Subject Index
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