ULSI process integration 5

著者

• Claeys, Cor L.
• Electrochemical Society. Meeting

書誌事項

ULSI process integration 5

editors, C.L. Claeys ... [et al.]

（ECS transactions, vol. 11, no. 6）

Electrochemical Society, c2007

注記

Includes bibliographical references and index

Papers presented at the 5th Symposium on ULSI Process Integration at the 212th Meeting of the Electrochemical Society, Washington D.C., October 7-12, 2007

• NII書誌ID(NCID): BA83423796
• ISBN:
  • 9781566775724
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, N.J.
• ページ数/冊数: ix, 495 p.
• 大きさ: 23 cm
• 親書誌ID:
  • BA78566502